Web4 sep. 2015 · If the etching is performed with an argon ion beam, it is difficult to identify the compounds because fragments of the compounds are generated during the etching. We evaluated the depth profile of substances in the lipid/polymer membrane starting from the surface, which was carried out by Toray Research Center (Tokyo, Japan) using a … WebAccess full book title Fundamental Mechanisms of Low-Energy-Beam Modified Surface Growth and Processing: by Steven C. Moss. Download full books in PDF and EPUB format. By : Steven C. Moss; 2014-06-05; ... Energetic particle sources include ion beams (for growth and sputter etching), cluster beams, pulsed laser beams and plasmas.
BY ION BEAM PROCESSING
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